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semiconductor display

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  • 5
    • 300mm KWF-Series MORE VIEW >
    • 특      징 (Feature)
      Accommodating device miniaturization Unique airflow analysis to prevent particles.N2 purge on load port.
      Accommodating various carriers Accommodating FOUP, MAC and AUTO-FOSB.
      High reliability High reliability achieved by accumulated technology of 300mm load port. (MCBF:1,000,000cycle) Detect double or crossed wafers by high precision mapping. Latch over-rotation to close carriers completely.
      Easy Maintenance No batteries are used, and maintenance is much easier
  • 4
    • 450mm KWF-Series MORE VIEW >
    • 특      징 (Feature)
      Accommodating device miniaturization Unique airflow analysis to prevent particles. N2 purge on load port.
      Accommodating various carriers Accommodating FOUP, MAC and AUTO-FOSB.
      High reliability High reliability achieved by accumulated technology of 300mm load port.(MCBF:1,000,000cycle) Latch over-rotation to close carriers completely.
      Easy maintenance No batteries are used, and maintenance is much easier.
  • 3
    • 200mm KWO-Series MORE VIEW >
    • 특      징 (Feature)
      Prevents the inclusion of particles by controlling air flow Prevents turbulence and the inclusion of particles by controlling the opening and closing operation
      High level of cleanliness performance Reduces particles by separating the machinery section and with forced exhaust
      Cassette transfer arm type Equipped with an arm featuring a tilt mechanism to transfer cassettes to process equipment
  • 2
    • 200mm KWY-Series MORE VIEW >
    • 특      징 (Feature)
      Supports reticule pods Capable of opening and closing RSP-200 standard pods (optional)
      Prevents the inclusion of particles by controlling air flow Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod
      High level of cleanliness performance Reduces particles by separating the machinery section and with forced exhaust
      Manual opening/closing type Supports opening and closing pods by the operator
  • 1
    • 200mm KWP-Series MORE VIEW >
    • 특      징 (Feature)
      Automatic opening and closing by host device type Achieves a mini environment by docking with the host device
      High level of cleanliness performance Reduces particles by separating the machinery section and with forced exhaust
      Prevents the inclusion of particles by controlling air flow Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod
      Small footprint Easily connected to and incorporated with dedicated equipment by the achievement of the small footprint
      Supports reticule pods Capable of opening and closing RSP-200 standard pods (optional)