Products Info

Robot

tmospheric type robot AR-Wn180CL Series

Lightweight ∙ Space saving ∙ High-speed transfer ∙ Compatible with multi-stage devices

Features

a rich variation Single arm, single arm with flip-axis, twin arm, twin arm with single-arm flip-axis, others
Supports a long stroke elevating axis Additional 940 mm long stroke variation with the telescopic elevating axis
Battery free Eliminates the encoder backup battery by employing a new encoder
Throughput improvements Achieves smooth, continuous movements by improvements in the movement control function uniquely developed by Hirata
Vibration suppression control Achieves the suppression of mechanical vibrations by employing vibration suppression control uniquely developed by Hirata
Atmospheric type robot AR-Wn180CL-5-TR-940

Features

Abundant variations Single arm, single arm with flip-axis, twin arm, twin arm with single-arm flip-axis, others
Supports a long stroke elevating axis Additional 940 mm long stroke variation with the telescopic elevating axis
Battery free Eliminates the encoder backup battery by employing a new encoder
Throughput improvements Achieves smooth, continuous movements by improvements in the movement control function uniquely developed by Hirata
Vibration suppression control Achieves the suppression of mechanical vibrations by employing vibration suppression control uniquely developed by Hirata
Vacuum type robot AR-Wn Series

High vacuum precision, high speed motion, and high reliability for both 300mm / 450mm Wafer provides ample arm variation

Features

Accommodating device miniaturization Adopting Direct Drive motors to suppress vibration less than 0.1G.
Adopting steel belt to suppress lateral vibration and drift.
High throughput High throughput achieved by rigid, precise and fast robot.
Smart Motion to shorten transfer time.
High reliability No possibility of scatter for magnetic fluid.
Collision detection to minimize damage to arm and time to restore.
Easy maintenance Special absolute encoder adopted to eliminate data backup battery and achieve easy maintenance.