EFEM / Sorter

Features

Supports process node scaling and advanced integration	Super Clean technology supports process node expansion, and the N2 purge function allows for quick replacement of air.
Abundant variations, customizable	We can respond to your requirements thanks to an expandable base design
Reliability built on our record	Inherits our robot technologies backed by our delivery record of over 40,000 units 5 years maintenance free
Throughput	Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies
Reduces the environmental burden	Battery free servo motors

Features

Supports process node scaling and advanced integration	Super Clean technology supports process node expansion, and the N2 purge function allows for quick replacement of air.
Abundant variations, customizable	We can respond to your requirements thanks to an expandable base design
Reliability built on our record	Inherits our robot technologies backed by our delivery record of over 40,000 units 5 years maintenance free
Throughput	Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies
Reduces the environmental burden	Battery free servo motors